真空泵
Vacuum Pumps
Photo for reference; configuration may vary by order.
Model No. VPU-0003 · Vacuum Equipment
Turbomolecular Vacuum Pump
涡轮分子真空泵
Surface analysis, thin-film deposition and electron microscopy demand high and ultra-high vacuum. This turbomolecular pump reaches below 10⁻⁷–10⁻¹⁰ mbar, pumping 50–3,000 L/s of nitrogen at 20,000–90,000 rpm on ceramic ball or magnetic bearings. It needs backing below 0.1 mbar. Specify DN 63–DN 250 CF or KF flange and air or water cooling.
- Ultimate pressure
- Below 10⁻⁷–10⁻¹⁰ mbar
- Pumping speed (N2)
- 50–3,000 L/s
- Rotor speed
- 20,000–90,000 rpm
- Compression ratio (N2)
- 10⁸–10¹¹
- Bearing type
- Ceramic ball or magnetic
Packing & Shipping
| Place of origin | China (dispatched from Shanghai) |
|---|---|
| Brand | Liquid International / OEM on request |
| Export packing | Fumigation-free plywood case or reinforced carton |
| Loading port | Shanghai / Ningbo (others on request) |
| Payment terms | T/T, L/C at sight (confirmed on quotation) |
| Trade terms | EXW, FOB, CFR, CIF, DAP |
Typical export terms — final terms are confirmed on the proforma invoice.
Product Description 产品描述
Surface analysis, thin-film deposition and electron microscopy demand high and ultra-high vacuum. This turbomolecular pump reaches below 10⁻⁷–10⁻¹⁰ mbar, pumping 50–3,000 L/s of nitrogen at 20,000–90,000 rpm on ceramic ball or magnetic bearings. It needs backing below 0.1 mbar. Specify DN 63–DN 250 CF or KF flange and air or water cooling.
Highlights
- Ultimate pressure below 10⁻⁷–10⁻¹⁰ mbar
- 50–3,000 L/s for nitrogen
- Ceramic ball or magnetic bearings
- DN 63–DN 250 CF or KF inlet
Applications
- Electron microscopy
- Surface analysis and XPS
- Mass spectrometry
- Thin-film deposition
- Semiconductor and coating processes
Specifications 技术参数
| Parameter | Value |
|---|---|
| Ultimate pressure 极限压力 | Below 10⁻⁷–10⁻¹⁰ mbar |
| Pumping speed (N2) 抽速（N2） | 50–3,000 L/s |
| Rotor speed 转速 | 20,000–90,000 rpm |
| Compression ratio (N2) 压缩比（N2） | 10⁸–10¹¹ |
| Bearing type 轴承类型 | Ceramic ball or magnetic |
| Backing pressure 前级压力 | Below 0.1 mbar |
| Inlet flange 进气法兰 | DN 63–DN 250 CF or KF |
| Cooling 冷却 | Air or water |
| Weight 重量 | 5–40 kg |
| Power supply 供电 | 24 V DC or 220 V controller |
| Model No. | VPU-0003 |
| Place of origin | China (dispatched from Shanghai) |
Applicable standards 适用标准
IEC 61010-1
IEC 61326-1
ISO 21360
ISO 27893
ISO 20485
GB 4793.1
Chinese national standards (GB/T, JJG) and international standards referenced for this product type. Test reports and certificates are supplied with the quotation on request.
Packing & Shipping 包装与运输
Export packing
Fumigation-free plywood case or reinforced carton
Every unit is power-tested before packing; enclosed in shock foam and moisture barrier; wooden cases comply with ISPM 15.
Loading port
Shanghai / Ningbo (others on request)
Full container load (FCL), less-than-container load (LCL) or air freight; complete export documentation provided.
Inquiry Now 索取报价
Complete the form below — an export engineer will send technical configurations and a formal proforma invoice within 24 hours.
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