表面轮廓仪

Surface Profilometers

White-Light Interferometric 3D Optical Profilometer 白光干涉三维光学轮廓仪

Photo for reference; configuration may vary by order.

Model No. SUP-0002 · Surface Analysis Instruments

White-Light Interferometric 3D Optical Profilometer

白光干涉三维光学轮廓仪

MEMS, semiconductor and optics teams that cannot touch the surface use white-light interferometry for areal roughness and step height. Vertical resolution is below 0.1 nm in PSI mode and about 1 nm in CSI mode, with a vertical scan of up to 10 mm. Objectives run 2.5×–100×, giving 0.05–5 mm fields. Step height repeatability is within 0.1%.

Vertical resolution: < 0.1 nm (PSI); ~1 nm (CSI)
Vertical scan range: Up to 10 mm
Objectives: 2.5×–100×
Field of view: 0.05–5 mm
Lateral resolution: 0.35–4 µm (objective-dependent)

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Packing & Shipping

Place of origin	China (dispatched from Shanghai)
Brand	Liquid International / OEM on request
Export packing	Fumigation-free plywood case or reinforced carton
Loading port	Shanghai / Ningbo (others on request)
Payment terms	T/T, L/C at sight (confirmed on quotation)
Trade terms	EXW, FOB, CFR, CIF, DAP

Typical export terms — final terms are confirmed on the proforma invoice.

Product Description 产品描述

Highlights

Sub-nanometre vertical resolution in PSI mode
Vertical scan range up to 10 mm
Objective choice from 2.5× to 100×
High-NA optics measure slopes up to about 70°

Applications

MEMS and semiconductor topography
Optical surface roughness
Polished metal and ceramic analysis
Thin film step height

Specifications 技术参数

Parameter	Value
Vertical resolution 垂直分辨率	< 0.1 nm (PSI); ~1 nm (CSI)
Vertical scan range 垂直扫描范围	Up to 10 mm
Objectives 物镜	2.5×–100×
Field of view 视场	0.05–5 mm
Lateral resolution 横向分辨率	0.35–4 µm (objective-dependent)
Camera 相机	1–5 MP
Step height repeatability 台阶高度重复性	≤ 0.1% (1σ)
Maximum slope 最大斜率	≈ 30° (smooth), up to 70° with high NA
Sample size 样品尺寸	Up to 200 × 200 mm, 100 mm height
Measurement time 测量时间	5–60 s per field
Model No.	SUP-0002
Place of origin	China (dispatched from Shanghai)

Applicable standards 适用标准

ISO 4287 ISO 21920-2 ISO 25178-2 ISO 4288 ASTM D7127

Chinese national standards (GB/T, JJG) and international standards referenced for this product type. Test reports and certificates are supplied with the quotation on request.